Laser Scriber SS-3001G2
This system is for scribe processing of electronic device substrate using solid-state laser beam.
Applicable substrate material
- Mainly Alumina ceramic
Standard specification
- Applicable wafer size : 50㎜×60㎜
- Substrate Loading/Unloading
- Auto Alignment function for processing point
- Optical Unit with Motor Drive Focus System
- Alignment system for front/back both side
| Wave Length | 1064nm |
| Traveling Speed | 350mm/s |
| Absolute positioning accuracy | under ±5μm |
| Applicable set up number of substrate in a magazine | 100sheets |