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Laser Scriber SS-3001G2

Laser Scriber SS-3001G2
This system is for scribe processing of electronic device substrate using solid-state laser beam.

Applicable substrate material

  • Mainly Alumina ceramic

Standard specification

  • Applicable wafer size : 50㎜×60㎜
  • Substrate Loading/Unloading
  • Auto Alignment function for processing point
  • Optical Unit with Motor Drive Focus System
  • Alignment system for front/back both side
Wave Length 1064nm
Traveling Speed 350mm/s
Absolute positioning accuracy under ±5μm
Applicable set up number of substrate in a magazine 100sheets
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