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Laser Scriber For LED

Laser Scriber For LED SS-3031GB-AL02
This system is for processing of substrate for LED,LD using solid-state laser beam. (Ablation, Laser Lift Off, etc.)

Applicable substrate material

  • sapphire, GaN, SiC

Standard Specifications

  • Applicable wafer size : up to 4 inches
  • Transfer robot
  • Auto Alignment unit for processing point
  • Work thickness calibration
  • Laser power alignment unit
Wave Length 355nm, 266nm
Traveling Speed 400mm/s
Absolute positioning accuracy under ±5μm
Applicable set up number of substrate in a magazine 24 pieces
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